Department of Micro and Nanosystems

Welcome to the department of Micro and Nanosystems (MST) at the School of Electrical Engineering and Computer Science!

The Micro and Nanosystems research group is focused on Micro- and Nanoelectromechanical Systems (MEMS/NEMS) and their applications. Headed by prof. Göran Stemme, the lab is formed by a group of senior researchers with different specializations as well as a number of PhD students.


At MST we provide courses in Measurement and Microsystems Technology. We offer project courses and master thesis projects for undergraduate students and welcome graduate students to join our group for post graduate education.


The research at Micro and Nanosystems focuses on Microelectromechanical Systems (MEMS) and its applications in the medical (MedMEMS), biotechnology (BioMEMS), optical (OptoMEMS) and radio frequency (RFMEMS) fields.

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