Per-Erik Hellström
PROFESSOR
Detaljer
Forskare
Om mig
My research interests are in semiconductor process technology, especially the heterogeneous integration of materials and devices with Si CMOS technology to augment integrated circuits. More specifically I have together with Ph.D. students developed a double patterning technique that we use to fabricate nanometer-sized transistors. We also study the integration of new materials such as SiGe, Ge, high-k dielectrics, and metal gates. A key objective is to develop processes, devices, and circuits for sequential 3D integration in future CMOS technologies. I lead the work on KTH's FDSOI CMOS process and circuit technology, which is the baseline for the research on the integration of new materials and devices with CMOS electronics.
I manage the Si and SiC process line in the Electrum Laboratory with responsibility for the maintenance of tools, uptime, process control, upgrades, and future tool investments.
I teach courses in electrical circuits, semiconductor devices, and process technology at the Bachelor and Master levels.
Kurser
Ellära (IF1330), examinator, kursansvarig, lärare | Kurswebb
Forskningsmetodik och vetenskapligt språk för nanoteknik (IL2231), lärare | Kurswebb
Inbyggd elektronik (IE1206), examinator, kursansvarig, lärare | Kurswebb
Nanokomponenttillverkning (FIH3608), examinator, lärare | Kurswebb
Tillverkningstekniker för nanokomponenter (IH2659), examinator, kursansvarig, lärare | Kurswebb