RSEM Infrastructure
RSEM Infrastructure comprise the state-of-the-art and base-line EM equipment, located at ITM, CBH and SCI schools.
The infrastructure includes following types of the characterization techniques:
- SEM: scanning electron microscopy
- TEM: transmission electron microscopy
- STEM: scanning transmission electron microscopy
- FIB: focused ion beam microscopy
- EDXS: energy dispersive X-Ray spectroscopy
- WDXS: wavelength dispersive X-Ray spectroscopy
- EELS: electron energy loss spectroscopy
- EBSD / TKD: electron backscatter diffraction / transmission Kikuchi diffraction
- In situ diffraction studies
- Ultrafast electron microscopy
- In situ SEM mechanical testing
- Environmental, low-/high- vacuum SEM studies
- EM analysis at elevated at cryogenic temperatures
- Advanced sample preparation
- TEM lamella preparation in FIB-SEM
- Tomography and 3D reconstruction
- In situ modification and growth in FIB-SEM
- EBID/IBID: electron-/ion-beam induced deposition