SEM Scanning Electron Microscopy

High-resolution high-vacuum cold field-emission Hitachi SEM S-4800 (Japan). It is equipped with SE, BSE, STEM and EDS detectors (X-Max 80 SDD EDS detector from Oxford Instruments, UK). For sample grounding the Cressington sputter coater 208HR (Pt:Pd target) is used.

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The JEOL JSM 7800F is a high-resolution high-current Schottky field-emission SEM that allows for imaging with a spatial resolution down to 0.8 nm at 15 kV and 1.2 nm at 1 kV.

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Zeiss Ultra 55 GEMINI is a high-resolution field-emission SEM. It comprises an in-lens SE detector, a fully integrated energy and angle selective backscattered electron (EsB) detector and an Everhart-Thornley type of detector. 

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Baseline SEM FEI XL30 equipped with an Oxford Instruments X-Max 20 EDS detector.

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Hitachi SEM S-3700N is equipped with a thermionic W filament and following detectors: ETD SE, high-sensitivity semiconductor five-segment BSE, Bruker windowless EDS and WDS detectors.

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SEM JEOL JSM-6490LV is equipped with LaB6 filament, secondary electron, backscattered and JEOL EX-54165JMH EDS detectors.

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Low-vacuum Hitachi Tabletop SEM TM-1000 (Japan) and Deben Microtester 50N/ 200N tensile stage.

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Apreo 2s at 2MILab is equipped with a 60 mm² Thermo Fisher Ultradry EDS detector enables high resolution and high sensitivity “in situ” EDS imaging and spectroscopy within the SEM software.

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