FIB-SEM

FEI Nova 200 Nanolab is the versatile high-resolution FIB-SEM (Dual Beam) system. It is equipped with a motorized stage, in-lens and SE detectors, Pt GIS (gas injection system), a pair of Kleindeck micromanipulators, Oxford Ultim Max 40 detector with AZtec live software and 4 x 14 strand electrical connectors to sample stage.

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The Nova 600 NanoLab is a Dual-Beam system (combining ultra-high-resolution SEM and Focused Ion Beam). This is a complete nanotechnology lab in a single tool, which enables nanoscale chemical synthesis, top-down machining, deposition, nanoscale prototyping, 2D and 3D-characterization and analysis of nanostructures below 100 nm. It combines ultra-high-resolution field emission scanning electron microscopy, precise focused ion beam etch and deposition and analysis.

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FEI Quanta 3D FEG is the versatile high-resolution, low-vacuum FIB-SEM (Dual Beam) for 2D & 3D material characterization and manipulation. Featuring three imaging modes – high vacuum, low vacuum and ESEM (Environmental), it accommodates the widest range of samples of any SEM system. This system also offers the capability for in situ study of the dynamic behavior of materials at different humidity levels (up to 100% RH) and temperatures (up to 1500 °C).

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