FIB-SEM FEI Quanta 3D FEG (Kista)
FEI Quanta 3D FEG is the versatile high-resolution, low-vacuum FIB-SEM (Dual Beam) for 2D & 3D material characterization and manipulation. Featuring three imaging modes – high vacuum, low vacuum and ESEM (Environmental), it accommodates the widest range of samples of any SEM system. This system also offers the capability for in situ study of the dynamic behavior of materials at different humidity levels (up to 100% RH) and temperatures (up to 1500 °C).
With multiple SE detectors and gas injectors, Quanta 3D FEG’s unprecedented high-current FIB enables fast material removal and features live SEM imaging while milling. A large selection of gas chemistries is available to deposit materials or further enhance the FIB milling rate or material selectivity. Automated FIB sectioning recipes enable accurate cross-sectioning, making the FIB-SEM a superior solution for fast preparation of large samples over a wide range of materials.
Booking page FEI Quanta 3D FEG
Main contact person: Fei Ye ( feiy@kth.se ).
Location: Isafjordsgatan 22, Kista Electrum Laboratory
Department of Applied Physics, Division of Materials and Nanophysics www.aphys.kth.se/mnp