Till KTH:s startsida Till KTH:s startsida

Summary; course goals; what is expecting you?

Next scheduled course run: 2014-HT-P2
(autumn term 2015, 2nd period, first course meeting on 2 November 2015 at 13:15 - 15:00 Location: Q24, Osquldas väg 6B, 2nd floor)

Please note that also in 2015-HT-P2, there will be offered a PhD student version of the course with the course number FEK3360, and 10 ECTS credits. If you are interested in taking that course, contact the course responsible.

The course is designed as a “hands-on” project course for students who would like to experience the world of nano/microelectromachnical systems (NEMS/MEMS) by having a "hands-on" experience, i.e. by carrying out a microsystem engineering project by designing, fabricating and evaluating tiny but complex devices of sub-millimeter size. This course is given annually, in the 2nd period of every autumn term at KTH (HT-P2; typically last week of October to second week of December).

Course goals:

The students will go through a complete microsystem engineering cycle, as shown in the picture below. Upon completion of the course, they will be able:

  1. to conceptualize microsystem/microactuator devices for given real-world specifications,
  2. to model and to simulate microsystems in finite-element (FEM) software,
  3. to implement designs of microsystems with state-of-the-art CAD design tools into fabrication-ready layouts,
  4. to fabricate microsystem devices in a state-of-the-art 200-mm wafer semiconductor clean-room laboratory,
  5. to characterize the performance of microsystem devices, including a comparison of the measured to the predicted performance by the simulations,
  6. to analyse failure mechanisms and to propose design improvements for a subsequent engineering cycle.

 


What is expecting you?

Check out the pictures below ...

Course outline

Microsystem Engineering cycle, through which the students will be guided in the course.

  

clean-room fabrication 2012a

Students (2012 course) fabricating their microsystems in KTH's clean-room. The microsystems are fabricated on such silicon wafers.

   

clean-room fabrication 2012b

Students (2012 course) in KTH's clean-room during the fabrication part of the microsystems. Here they measure the surface profile of microstructures, to evaluate whether their previous fabrication processes has been successful, before passing on to the next fabrication step.

   

evaluation

Evaluation of a fabricated chip on a semiconductor wafer measurement probe station (2011 course run). Every student receives such a chip, with his/her own devices and fabricated by himself/herself, as a souvernir after the course.

   

microscope picture of chip

Microscope picture of a microsystem chip fabricated by the students (2011 course run). The probe needles are used for feeding the microsystem actuators with electrical potential, to generate mechanical movements. This chip worked as expected!

   

For a more detailed description on the course activities, click here.

Return to main course page.

Lärare Joachim Oberhammer skapade sidan 9 augusti 2012

Joachim Oberhammer redigerade 9 augusti 2012

BRIEF SUMMARY¶

The course is designed as a “hands-on” project course for students who would like to deepen their understanding of nano/microelectromachnical systems (NEMS/MEMS), by actively designing, fabricating and evaluating different microacuator concepts.¶

The course targets MSc level students, preferably with background in Electrical Engineering, Mechanical Engineering, or Engineering Physics. Pre-knowledge in microsystems, nanotechnology, or semiconductor technology is advantageous for some course parts, for instance the fabrication, but not necessary at all. General understanding of physics, and curiosity for the application of physical effects on a micro/nano-scale, is the best starting point for designing your own moving microsystem!¶

This course is given annually, in the 2nd period of every autumn term at KTH (HT-P2; October to December).¶



FURTHER INFORMATION¶

Course participants: Typically, 20% of the students are PhD students. Under certain circumstances, PhD students may create and carry out their own task in the world of microsystem technology.¶

Results of previous course evaluation: During 2011, 14 students took the course, of which 4 were PhD students. Course evaluation results from 2011 (only given for MSc students): 30% of the students consider the course as among the top 10% of KTH's courses, and 70% of the students consider the course as among the top 25% of KTH's courses.¶

Course language: English.¶

Course coordinator: Assoc.-Prof. Joachim Oberhammer.¶

A promotional PDF document for the course can be downloaded below (click COURSE PROMOTION).¶

Course office for students: STEX (Osquldas väg 10, ground floor).¶

The course consists of three introductory lectures (there the dates for the lectures 2 and 3 will be decided at the first meeting) followed by the course work, which is framed by weekly progress meetings with the course responsible and his teaching assistants.¶

For any questions, in particular on the suitability of your background to the course, please contact the course responsible.¶

Joachim Oberhammer redigerade 9 augusti 2012

BRIEF SUMMARY

The course is designed as a “hands-on” project course for students who would like to deepen their understanding of nano/microelectromachnical systems (NEMS/MEMS), by actively designing, fabricating and evaluating different microacuator concepts.

The course targets MSc level students, preferably with background in Electrical Engineering, Mechanical Engineering, or Engineering Physics. Pre-knowledge in microsystems, nanotechnology, or semiconductor technology is advantageous for some course parts, for instance the fabrication, but not necessary at all. General understanding of physics, and curiosity for the application of physical effects on a micro/nano-scale, is the best starting point for designing your own moving microsystem!

This course is given annually, in the 2nd period of every autumn term at KTH (HT-P2; October to December).

FURTHER INFORMATION

Course participants: Typically, 20% of the students are PhD students. Under certain circumstances, PhD students may create and carry out their own task in the world of microsystem technology.

Results of previous course evaluation: During 2011, 14 students took the course, of which 4 were PhD students. Course evaluation results from 2011 (only given for MSc students): 30% of the students consider the course as among the top 10% of KTH's courses, and 70% of the students consider the course as among the top 25% of KTH's courses.

Course language: English.

Course coordinator: Assoc.-Prof. Joachim Oberhammer.

A promotional PDF document for the course can be downloaded below (click COURSE PROMOTION).

Course office for students:  STEX (Osquldas väg 10, ground floor).

The course consists of three introductory lectures (there the dates for the lectures 2 and 3 will be decided at the first meeting) followed by the course work, which is framed by weekly progress meetings with the course responsible and his teaching assistants.

For any questions, in particular on the suitability of your background to the course, please contact the course responsible.

Joachim Oberhammer redigerade 9 augusti 2012

BRIEF SUMMARY

The course is designed as a “hands-on” project course for students who would like to deepen their understanding of nano/microelectromachnical systems (NEMS/MEMS), by actively designing, fabricating and evaluating different microacuator concepts.

The course targets MSc level students, preferably with background in Electrical Engineering, Mechanical Engineering, or Engineering Physics. Pre-knowledge in microsystems, nanotechnology, or semiconductor technology is advantageous for some course parts, for instance the fabrication, but not necessary at all. General understanding of physics, and curiosity for the application of physical effects on a micro/nano-scale, is the best starting point for designing your own moving microsystem!

This course is given annually, in the 2nd period of every autumn term at KTH (HT-P2; October to December).

FURTHER INFORMATION

Course participants: Typically, 20% of the students are PhD students. Under certain circumstances, PhD students may create and carry out their own task in the world of microsystem technology.

Results of previous course evaluation: During 2011, 14 students took the course, of which 4 were PhD students. Course evaluation results from 2011 (only given for MSc students): 30% of the students consider the course as among the top 10% of KTH's courses, and 70% of the students consider the course as among the top 25% of KTH's courses.

Course language: English.

Course coordinator: Assoc.-Prof. Joachim Oberhammer.

A promotional PDF document for the course can be downloaded below (click COURSE PROMOTION).

Course office for students: STEX (Osquldas väg 10, ground floor).

The course consists of three introductory lectures (there the dates for the lectures 2 and 3 will be decided at the first meeting) followed by the course work, which is framed by weekly progress meetings with the course responsible and his teaching assistants.

For any questions, in particular on the suitability of your background to the course, please contact the course responsible.

Joachim Oberhammer redigerade 9 augusti 2012

BRIEF SUMMARY

The course is designed as a “hands-on” project course for students who would like to deepen their understanding of nano/microelectromachnical systems (NEMS/MEMS), by actively designing, fabricating and evaluating different microacuator concepts.

The course targets MSc level students, preferably with background in Electrical Engineering, Mechanical Engineering, or Engineering Physics. Pre-knowledge in microsystems, nanotechnology, or semiconductor technology is advantageous for some course parts, for instance the fabrication, but not necessary at all. General understanding of physics, and curiosity for the application of physical effects on a micro/nano-scale, is the best starting point for designing your own moving microsystem!

This course is given annually, in the 2nd period of every autumn term at KTH (HT-P2; October to December).

FURTHER INFORMATION

Course participants: Typically, 20% of the students are PhD students. Under certain circumstances, PhD students may create and carry out their own task in the world of microsystem technology.

Results of previous course evaluation: During 2011, 14 students took the course, of which 4 were PhD students. Course evaluation results from 2011 (only given for MSc students): 30% of the students consider the course as among the top 10% of KTH's courses, and 70% of the students consider the course as among the top 25% of KTH's courses.

Course language: English.

Course coordinator: Assoc.-Prof. Joachim Oberhammer.

A promotional PDF document for the course can be downloaded below (click COURSE PROMOTION)Official course description: Course description of 2010.

Course office for students: STEX (Osquldas väg 10, ground floor).

Course work: The course consists of three introductory lectures (there the dates for the lectures 2 and 3 will be decided at the first meeting) followed by the course work, which is framed by weekly progress meetings with the course responsible and his teaching assistants.

For any questions, in particular on the suitability of your background to the course, please contact the course responsiblecoordinator.

Joachim Oberhammer redigerade 9 augusti 2012

BRIEF SUMMARY

The course is designed as a “hands-on” project course for students who would like to deepen their understanding of nano/microelectromachnical systems (NEMS/MEMS), by actively designing, fabricating and evaluating different microacuator concepts.

The course targets MSc level students, preferably with background in Electrical Engineering, Mechanical Engineering, or Engineering Physics. Pre-knowledge in microsystems, nanotechnology, or semiconductor technology is advantageous for some course parts, for instance the fabrication, but not necessary at all. General understanding of physics, and curiosity for the application of physical effects on a micro/nano-scale, is the best starting point for designing your own moving microsystem!

This course is given annually, in the 2nd period of every autumn term at KTH (HT-P2; October to December).

FURTHER INFORMATION

Course participants: Typically, 20% of the students are PhD students. Under certain circumstances, PhD students may create and carry out their own task in the world of microsystem technology.

Results of previous course evaluation: During 2011, 14 students took the course, of which 4 were PhD students. Course evaluation results from 2011 (only given for MSc students): 30% of the students consider the course as among the top 10% of KTH's courses, and 70% of the students consider the course as among the top 25% of KTH's courses.

Course language: English.

Course coordinator: Assoc.-Prof. Joachim Oberhammer.

Official course description: Course description of 2010.

Course office for students: STEX (Osquldas väg 10, ground floor).

Course workcontent: The course consists of three introductory lectures (there the dates for the lectures 2 and 3 will be decided at the first meeting) followed by the course work, which is framed by weekly progress meetings with the course responsible and his teaching assistants.

The student will be able to to design thier own microsystem devices using simulation and CAD tools, to fabricate the devices in a clean-room laboratory, to characterize the devices, and to analyse failure mechanisms as well as propose design improvements.¶

The course starts with lectures introducing the student to MEMS design tools, and providing them with specifications of the real-world problems they have to solve.¶

Then, the students will work in groups of 2–3, develop device concepts, and verify these using state-of-the art FEM simulation tools, and then design the devices with CAD software.¶

In the next step, the students will fabricate their own devices with state-of-the-art micromachining/semiconductor manufacturing tools in the the KTH clean-room laboratory.¶

Afterwards, the students will evaluate their devices by characterizing them with various test setups to find out which of their designs has best performance according to the given specifications.¶

In the final step, the students will analyze the failure mechanisms of their devices, and have to propose design improvements for a potential next development cycle.¶

 For any questions, in particular on the suitability of your background to the course, please contact the course coordinator.

Joachim Oberhammer redigerade 9 augusti 2012

BRIEF SUMMARY

The course is designed as a “hands-on” project course for students who would like to deepen their understanding of nano/microelectromachnical systems (NEMS/MEMS), by actively designing, fabricating and evaluating different microacuator concepts.

The course targets MSc level students, preferably with background in Electrical Engineering, Mechanical Engineering, or Engineering Physics. Pre-knowledge in microsystems, nanotechnology, or semiconductor technology is advantageous for some course parts, for instance the fabrication, but not necessary at all. General understanding of physics, and curiosity for the application of physical effects on a micro/nano-scale, is the best starting point for designing your own moving microsystem!

This course is given annually, in the 2nd period of every autumn term at KTH (HT-P2; October to December).

FURTHER INFORMATION

Course participants: Typically, 20% of the students are PhD students. Under certain circumstances, PhD students may create and carry out their own task in the world of microsystem technology.

Results of previous course evaluation: During 2011, 14 students took the course, of which 4 were PhD students. Course evaluation results from 2011 (only given for MSc students): 30% of the students consider the course as among the top 10% of KTH's courses, and 70% of the students consider the course as among the top 25% of KTH's courses.

Course language: English.

Course coordinator: Assoc.-Prof. Joachim Oberhammer.

Official course description: COriginal course description of 2010.

Course office for students: STEX (Osquldas väg 10, ground floor).

Course content: The course consists of three introductory lectures (there the dates for the lectures 2 and 3 will be decided at the first meeting) followed by the course work, which is framed by weekly progress meetings with the course responsible and his teaching assistants.

The student will be able to to design thier own microsystem devices using simulation and CAD tools, to fabricate the devices in a clean-room laboratory, to characterize the devices, and to analyse failure mechanisms as well as propose design improvements.

The course starts with lectures introducing the student to MEMS design tools, and providing them with specifications of the real-world problems they have to solve.

Then, the students will work in groups of 2–3, develop device concepts, and verify these using state-of-the art FEM simulation tools, and then design the devices with CAD software.

In the next step, the students will fabricate their own devices with state-of-the-art micromachining/semiconductor manufacturing tools in the the KTH clean-room laboratory.

Afterwards, the students will evaluate their devices by characterizing them with various test setups to find out which of their designs has best performance according to the given specifications.

In the final step, the students will analyze the failure mechanisms of their devices, and have to propose design improvements for a potential next development cycle.

For any questions, in particular on the suitability of your background to the course, please contact the course coordinator.

Joachim Oberhammer redigerade 9 augusti 2012

BRIEF SUMMARY

The course is designed as a “hands-on” project course for students who would like to deepen their understanding of nano/microelectromachnical systems (NEMS/MEMS), by actively designing, fabricating and evaluating different microacuator concepts.

The course targets MSc level students, preferably with background in Electrical Engineering, Mechanical Engineering, or Engineering Physics. Pre-knowledge in microsystems, nanotechnology, or semiconductor technology is advantageous for some course parts, for instance the fabrication, but not necessary at all. General understanding of physics, and curiosity for the application of physical effects on a micro/nano-scale, is the best starting point for designing your own moving microsystem!

This course is given annually, in the 2nd period of every autumn term at KTH (HT-P2; October to December).

FURTHER INFORMATION

Course participants: Typically, 20% of the students are PhD students. Under certain circumstances, PhD students may create and carry out their own task in the world of microsystem technology.

Results of previous course evaluation: During 2011, 14 students took the course, of which 4 were PhD students. Course evaluation results from 2011 (only given for MSc students): 30% of the students consider the course as among the top 10% of KTH's courses, and 70% of the students consider the course as among the top 25% of KTH's courses.

Course language: English.

Course coordinator: Assoc.-Prof. Joachim Oberhammer.

Official course description: Original course description.

Course office for students: STEX (Osquldas väg 10, ground floor).

Course content:

 The course consists of three introductory lectures (there the dates for the lectures 2 and 3 will be decided at the first meeting) followed by the course work, which is framed by weekly progress meetings with the course responsible and his teaching assistants.

The student will be able to to design thier own microsystem devices using simulation and CAD tools, to fabricate the devices in a clean-room laboratory, to characterize the devices, and to analyse failure mechanisms as well as propose design improvements.

The course starts with lectures introducing the student to MEMS design tools, and providing them with specifications of the real-world problems they have to solve.

Then, the students will work in groups of 2–3, develop device concepts, and verify these using state-of-the art FEM simulation tools, and then design the devices with CAD software.

In the next step, the students will fabricate their own devices with state-of-the-art micromachining/semiconductor manufacturing tools in the the KTH clean-room laboratory.

Afterwards, the students will evaluate their devices by characterizing them with various test setups to find out which of their designs has best performance according to the given specifications.

In the final step, the students will analyze the failure mechanisms of their devices, and have to propose design improvements for a potential next development cycle.

For any questions, in particular on the suitability of your background to the course, please contact the course coordinator.

Joachim Oberhammer redigerade 9 augusti 2012

BRIEF SUMMARY

The course is designed as a “hands-on” project course for students who would like to deepen their understanding of nano/microelectromachnical systems (NEMS/MEMS), by actively designing, fabricating and evaluating different microacuator concepts.

The course targets MSc level students, preferably with background in Electrical Engineering, Mechanical Engineering, or Engineering Physics. Pre-knowledge in microsystems, nanotechnology, or semiconductor technology is advantageous for some course parts, for instance the fabrication, but not necessary at all. General understanding of physics, and curiosity for the application of physical effects on a micro/nano-scale, is the best starting point for designing your own moving microsystem!

This course is given annually, in the 2nd period of every autumn term at KTH (HT-P2; October to December).

FURTHER INFORMATION

Course participants: Typically, 20% of the students are PhD students. Under certain circumstances, PhD students may create and carry out their own task in the world of microsystem technology.

Results of previous course evaluation: During 2011, 14 students took the course, of which 4 were PhD students. Course evaluation results from 2011 (only given for MSc students): 30% of the students consider the course as among the top 10% of KTH's courses, and 70% of the students consider the course as among the top 25% of KTH's courses.

Course language: English.

Course coordinator: Assoc.-Prof. Joachim Oberhammer.

Official course description: Original course description.

Course office for students: STEX (Osquldas väg 10, ground floor).

Course content:

The course consists of three introductory lectures (there the dates for the lectures 2 and 3 will be decided at the first meeting) followed by the course work, which is framed by weekly progress meetings with the course responsible and his teaching assistants.

The student will be able to to design thier own microsystem devices using simulation and CAD tools, to fabricate the devices in a clean-room laboratory, to characterize the devices, and to analyse failure mechanisms as well as propose design improvements.

The course starts with lectures introducing the student to MEMS design tools, and providing them with specifications of the real-world problems they have to solve.

Then, the students will work in groups of 2–3, develop device concepts, and verify these using state-of-the art FEM simulation tools, and then design the devices with CAD software.

In the next step, the students will fabricate their own devices with state-of-the-art micromachining/semiconductor manufacturing tools in the the KTH clean-room laboratory.

Afterwards, the students will evaluate their devices by characterizing them with various test setups to find out which of their designs has best performance according to the given specifications.

In the final step, the students will analyze the failure mechanisms of their devices, and have to propose design improvements for a potential next development cycle.

For any questions, in particular on the suitability of your background to the course, please contact the course coordinator.

Joachim Oberhammer redigerade 9 augusti 2012

BRIEF SUMMARY

The course is designed as a “hands-on” project course for students who would like to deepen their understanding of nano/microelectromachnical systems (NEMS/MEMS), by actively designing, fabricating and evaluating different microacuator concepts.

The course targets MSc level students, preferably with background in Electrical Engineering, Mechanical Engineering, or Engineering Physics. Pre-knowledge in microsystems, nanotechnology, or semiconductor technology is advantageous for some course parts, for instance the fabrication, but not necessary at all. General understanding of physics, and curiosity for the application of physical effects on a micro/nano-scale, is the best starting point for designing your own moving microsystem!

This course is given annually, in the 2nd period of every autumn term at KTH (HT-P2; October to December).

FURTHER INFORMATION

Course participants: Typically, 20% of the students are PhD students. Under certain circumstances, PhD students may create and carry out their own task in the world of microsystem technology.

Results of previous course evaluation: During 2011, 14 students took the course, of which 4 were PhD students. Course evaluation results from 2011 (only given for MSc students): 30% of the students consider the course as among the top 10% of KTH's courses, and 70% of the students consider the course as among the top 25% of KTH's courses.

Course language: English.

Course coordinator: Assoc.-Prof. Joachim Oberhammer.

Official course description: Original course description.

Course office for students: STEX (Osquldas väg 10, ground floor).

Course content: The course consists of three introductory lectures (there the dates for the lectures 2 and 3 will be decided at the first meeting) followed by the course work, which is framed by weekly progress meetings with the course responsible and his teaching assistants. The student will be able to to design thier own microsystem devices using simulation and CAD tools, to fabricate the devices in a clean-room laboratory, to characterize the devices, and to analyse failure mechanisms as well as propose design improvements. The course starts with lectures introducing the student to MEMS design tools, and providing them with specifications of the real-world problems they have to solve. Then, the students will work in groups of 2–3, develop device concepts, and verify these using state-of-the art FEM simulation tools, and then design the devices with CAD software. In the next step, the students will fabricate their own devices with state-of-the-art micromachining/semiconductor manufacturing tools in the the KTH clean-room laboratory. Afterwards, the students will evaluate their devices by characterizing them with various test setups to find out which of their designs has best performance according to the given specifications. In the final step, the students will analyze the failure mechanisms of their devices, and have to propose design improvements for a potential next development cycle.

For any questions, in particular on the suitability of your background to the course, please contact the course coordinator.

Joachim Oberhammer redigerade 9 augusti 2012

BRIEF SUMMARY

The course is designed as a “hands-on” project course for students who would like to deepen their understanding of nano/microelectromachnical systems (NEMS/MEMS), by actively designing, fabricating and evaluating different microacuator concepts.

The course targets MSc level students, preferably with background in Electrical Engineering, Mechanical Engineering, or Engineering Physics. Pre-knowledge in microsystems, nanotechnology, or semiconductor technology is advantageous for some course parts, for instance the fabrication, but not necessary at all. General understanding of physics, and curiosity for the application of physical effects on a micro/nano-scale, is the best starting point for designing your own moving microsystem!

This course is given annually, in the 2nd period of every autumn term at KTH (HT-P2; October to December).

FURTHER INFORMATION

Course participants: Typically, 20% of the students are PhD students. Under certain circumstances, PhD students may create and carry out their own task in the world of microsystem technology.

Results of previous course evaluation: During 2011, 14 students took the course, of which 4 were PhD students. Course evaluation results from 2011 (only given for MSc students): 30% of the students consider the course as among the top 10% of KTH's courses, and 70% of the students consider the course as among the top 25% of KTH's courses.

Course language: English.

Course coordinator: Assoc.-Prof. Joachim Oberhammer, KTH School of electrical Engineering, Microsystem Technology Laboratory.¶

Supervision: The progress of the work will be supervised by the course responsible. Additional, 2 PhD students tutor the course participants during the design phase, 2 PhD students will tutor during the fabrication phase, and 1 PhD student will tutor during the evaluation phase.¶

Place of the course events: The first (compulsory!) meeting and the final project presentations are held in lecture halls as specified in the course schedule (see link to the right), the other meetings, lectures, review meetings, and the design work will be carried out in the students lab at KTH's downtown campus, Osquldas väg 10, 2nd floor, room A:213. Students will get unrestricted access to that lab during the project work. The fabrication will be done in KTH's cleanroom laboratory in Kista (Isafjordsgatan 22-24). The evaluation will be done at the Microsystem Technology Laboratory at the KTH downtown campus, Osquldas väg 10, 5th floor.

Official course description: Original course description.

Course office for students: STEX (Osquldas väg 10, ground floor).

Course content: The course consists of three introductory lectures (there the dates for the lectures 2 and 3 will be decided at the first meeting) followed by the course work, which is framed by weekly progress meetings with the course responsible and his teaching assistants. The student will be able to to design thier own microsystem devices using simulation and CAD tools, to fabricate the devices in a clean-room laboratory, to characterize the devices, and to analyse failure mechanisms as well as propose design improvements. The course starts with lectures introducing the student to MEMS design tools, and providing them with specifications of the real-world problems they have to solve. Then, the students will work in groups of 2–3, develop device concepts, and verify these using state-of-the art FEM simulation tools, and then design the devices with CAD software. In the next step, the students will fabricate their own devices with state-of-the-art micromachining/semiconductor manufacturing tools in the the KTH clean-room laboratory. Afterwards, the students will evaluate their devices by characterizing them with various test setups to find out which of their designs has best performance according to the given specifications. In the final step, the students will analyze the failure mechanisms of their devices, and have to propose design improvements for a potential next development cycle.

For any questions, in particular on the suitability of your background to the course, please contact the course coordinator.

Joachim Oberhammer redigerade 10 augusti 2012

BRIEF SUMMARY

The course is designed as a “hands-on” project course for students who would like to deepen their understanding of nano/microelectromachnical systems (NEMS/MEMS), by actively designing, fabricating and evaluating different microacuator concepts.

The course targets MSc level students, preferably with background in Electrical Engineering, Mechanical Engineering, or Engineering Physics. Pre-knowledge in microsystems, nanotechnology, or semiconductor technology is advantageous for some course parts, for instance the fabrication, but not necessary at all. General understanding of physics, and curiosity for the application of physical effects on a micro/nano-scale, is the best starting point for designing your own moving microsystem!

This course is given annually, in the 2nd period of every autumn term at KTH (HT-P2; October to December).

FURTHER INFORMATION

Course participants: Typically, 20% of the students are PhD students. Under certain circumstances, PhD students may create and carry out their own task in the world of microsystem technology.

Results of previous course evaluation: During 2011, 14 students took the course, of which 4 were PhD students. Course evaluation results from 2011 (only given for MSc students): 30% of the students consider the course as among the top 10% of KTH's courses, and 70% of the students consider the course as among the top 25% of KTH's courses.

Course language: English.

Course coordinator: Assoc.-Prof. Joachim Oberhammer, KTH School of electrical Engineering, Microsystem Technology Laboratory.

Supervision: The progress of the work will be supervised by the course responsible. Additional, 2 PhD students tutor the course participants during the design phase, 2 PhD students will tutor during the fabrication phase, and 1 PhD student will tutor during the evaluation phase.

Place of the course events: The first (compulsory!) meeting and the final project presentations are held in lecture halls as specified in the course schedule (see link to the right), the other meetings, lectures, review meetings, and the design work will be carried out in the students lab at KTH's downtown campus, Osquldas väg 10, 2nd floor, room A:213. Students will get unrestricted access to that lab during the project work. The fabrication will be done in KTH's cleanroom laboratory in Kista (Isafjordsgatan 22-24). The evaluation will be done at the Microsystem Technology Laboratory at the KTH downtown campus, Osquldas väg 10, 5th floor.

Official course description: Original course description.

Course office for students: STEX (Osquldas väg 10, ground floor).

Course content: The course consists of three introductory lectures (there the dates for the lectures 2 and 3 will be decided at the first meeting) followed by the course work, which is framed by weekly progress meetings with the course responsible and his teaching assistants. The student will be able to to design thier own microsystem devices using simulation and CAD tools, to fabricate the devices in a clean-room laboratory, to characterize the devices, and to analyse failure mechanisms as well as propose design improvements. The course starts with lectures introducing the student to MEMS design tools, and providing them with specifications of the real-world problems they have to solve. Then, the students will work in groups of 2–3, develop device concepts, and verify these using state-of-the art FEM simulation tools, and then design the devices with CAD software. In the next step, the students will fabricate their own devices with state-of-the-art micromachining/semiconductor manufacturing tools in the the KTH clean-room laboratory. Afterwards, the students will evaluate their devices by characterizing them with various test setups to find out which of their designs has best performance according to the given specifications. In the final step, the students will analyze the failure mechanisms of their devices, and have to propose design improvements for a potential next development cycle.

For any questions, in particular on the suitability of your background to the course, please contact the course coordinator.



Return to main course page.¶

Joachim Oberhammer redigerade 10 augusti 2012

BRIEF SUMMARY

The course is designed as a “hands-on” project course for students who would like to deepen their understanding of nano/microelectromachnical systems (NEMS/MEMS), by actively designing, fabricating and evaluating different microacuator concepts.

The course targets MSc level students, preferably with background in Electrical Engineering, Mechanical Engineering, or Engineering Physics. Pre-knowledge in microsystems, nanotechnology, or semiconductor technology is advantageous for some course parts, for instance the fabrication, but not necessary at all. General understanding of physics, and curiosity for the application of physical effects on a micro/nano-scale, is the best starting point for designing your own moving microsystem!

This course is given annually, in the 2nd period of every autumn term at KTH (HT-P2; October to December).

FURTHER INFORMATION

Course participants: Typically, 20% of the students are PhD students. Under certain circumstances, PhD students may create and carry out their own task in the world of microsystem technology.

Results of previous course evaluation: During 2011, 14 students took the course, of which 4 were PhD students. Course evaluation results from 2011 (only given for MSc students): 30% of the students consider the course as among the top 10% of KTH's courses, and 70% of the students consider the course as among the top 25% of KTH's courses.

Course language: English.

Course coordinator: Assoc.-Prof. Joachim Oberhammer, KTH School of electrical Engineering, Microsystem Technology Laboratory.

Supervision: The progress of the work will be supervised by the course responsible. Additional, 2 PhD students tutor the course participants during the design phase, 2 PhD students will tutor during the fabrication phase, and 1 PhD student will tutor during the evaluation phase.

Place of the course events: The first (compulsory!) meeting and the final project presentations are held in lecture halls as specified in the course schedule (see link to the right), the other meetings, lectures, review meetings, and the design work will be carried out in the students lab at KTH's downtown campus, Osquldas väg 10, 2nd floor, room A:213. Students will get unrestricted access to that lab during the project work. The fabrication will be done in KTH's cleanroom laboratory in Kista (Isafjordsgatan 22-24). The evaluation will be done at the Microsystem Technology Laboratory at the KTH downtown campus, Osquldas väg 10, 5th floor.

Official course description: Original course description.

Course office for students: STEX (Osquldas väg 10, ground floor).

Course content: The course consists of three introductory lectures (there the dates for the lectures 2 and 3 will be decided at the first meeting) followed by the course work, which is framed by weekly progress meetings with the course responsible and his teaching assistants. The student will be able to to design thier own microsystem devices using simulation and CAD tools, to fabricate the devices in a clean-room laboratory, to characterize the devices, and to analyse failure mechanisms as well as propose design improvements. The course starts with lectures introducing the student to MEMS design tools, and providing them with specifications of the real-world problems they have to solve. Then, the students will work in groups of 2–3, develop device concepts, and verify these using state-of-the art FEM simulation tools, and then design the devices with CAD software. In the next step, the students will fabricate their own devices with state-of-the-art micromachining/semiconductor manufacturing tools in the the KTH clean-room laboratory. Afterwards, the students will evaluate their devices by characterizing them with various test setups to find out which of their designs has best performance according to the given specifications. In the final step, the students will analyze the failure mechanisms of their devices, and have to propose design improvements for a potential next development cycle.

For any questions, in particular on the suitability of your background to the course, please contact the course coordinator.

For course material, schedule, etc. for the current academic year click at the items of the respective year in the menu to the right. Most items are only visible if you are logged-in/registered to this course.¶



 Return to main course page.

Joachim Oberhammer redigerade 25 oktober 2012

BRIEF SUMMARY

The course is designed as a “hands-on” project course for students who would like to deepen their understanding of nano/microelectromachnical systems (NEMS/MEMS), by actively designing, fabricating and evaluating different microacuator concepts.

The course targets MSc level students, preferably with background in Electrical Engineering, Mechanical Engineering, or Engineering Physics. Pre-knowledge in microsystems, nanotechnology, or semiconductor technology is advantageous for some course parts, for instance the fabrication, but not necessary at all. General understanding of physics, and curiosity for the application of physical effects on a micro/nano-scale, is the best starting point for designing your own moving microsystem!

This course is given annually, in the 2nd period of every autumn term at KTH (HT-P2; October to December).

FURTHER INFORMATION

Course participants: Typically, 20% of the students are PhD students. Under certain circumstances, PhD students may create and carry out their own task in the world of microsystem technology.

Results of previous course evaluation: During 2011, 14 students took the course, of which 4 were PhD students. Course evaluation results from 2011 (only given for MSc students): 30% of the students consider the course as among the top 10% of KTH's courses, and 70% of the students consider the course as among the top 25% of KTH's courses.

Course language: English.

Course coordinator: Assoc.-Prof. Joachim Oberhammer, KTH School of electrical Engineering, Microsystem Technology Laboratory.

Supervision: The progress of the work will be supervised by the course responsible. Additional, 2 PhD students tutor the course participants during the design phase, 2 PhD students will tutor during the fabrication phase, and 1 PhD student will tutor during the evaluation phase.

Place of the course events: The first (compulsory!) meeting and the final project presentations are held in lecture halls as specified in the course schedule (see link to the right), the other meetings, lectures, review meetings, and the design work will be carried out in the students lab at KTH's downtown campus, Osquldas väg 10, 2nd floor, room A:213. Students will get unrestricted access to that lab during the project work. The fabrication will be done in KTH's cleanroom laboratory in Kista (Isafjordsgatan 22-24). The evaluation will be done at the Microsystem Technology Laboratory at the KTH downtown campus, Osquldas väg 10, 5th floor.

Official course description: Original course description. in the KTH databas, last update 2010. (information on the course on KTH Social is more frequently updated)

Course office for students: STEX (Osquldas väg 10, ground floor).

Course content: The course consists of three introductory lectures (there the dates for the lectures 2 and 3 will be decided at the first meeting) followed by the course work, which is framed by weekly progress meetings with the course responsible and his teaching assistants. The student will be able to to design thier own microsystem devices using simulation and CAD tools, to fabricate the devices in a clean-room laboratory, to characterize the devices, and to analyse failure mechanisms as well as propose design improvements. The course starts with lectures introducing the student to MEMS design tools, and providing them with specifications of the real-world problems they have to solve. Then, the students will work in groups of 2–3, develop device concepts, and verify these using state-of-the art FEM simulation tools, and then design the devices with CAD software. In the next step, the students will fabricate their own devices with state-of-the-art micromachining/semiconductor manufacturing tools in the the KTH clean-room laboratory. Afterwards, the students will evaluate their devices by characterizing them with various test setups to find out which of their designs has best performance according to the given specifications. In the final step, the students will analyze the failure mechanisms of their devices, and have to propose design improvements for a potential next development cycle.

For any questions, in particular on the suitability of your background to the course, please contact the course coordinator.

For course material, schedule, etc. for the current academic year click at the items of the respective year in the menu to the right. Most items are only visible if you are logged-in/registered to this course.

Return to main course page.

Joachim Oberhammer redigerade 25 oktober 2012

BRIEF SUMMARY

The course is designed as a “hands-on” project course for students who would like to deepen their understanding of nano/microelectromachnical systems (NEMS/MEMS), by actively designing, fabricating and evaluating different microacuator concepts.

The course targets MSc level students, preferably with background in Electrical Engineering, Mechanical Engineering, or Engineering Physics. Pre-knowledge in microsystems, nanotechnology, or semiconductor technology is advantageous for some course parts, for instance the fabrication, but not necessary at all. General understanding of physics, and curiosity for the application of physical effects on a micro/nano-scale, is the best starting point for designing your own moving microsystem!

This course is given annually, in the 2nd period of every autumn term at KTH (HT-P2; October to December).

Promotional flyer to the course of 2012¶

FURTHER INFORMATION

Course participants: Typically, 20% of the students are PhD students. Under certain circumstances, PhD students may create and carry out their own task in the world of microsystem technology.

Results of previous course evaluation: During 2011, 14 students took the course, of which 4 were PhD students. Course evaluation results from 2011 (only given for MSc students): 30% of the students consider the course as among the top 10% of KTH's courses, and 70% of the students consider the course as among the top 25% of KTH's courses.

Course language: English.

Course coordinator: Assoc.-Prof. Joachim Oberhammer, KTH School of electrical Engineering, Microsystem Technology Laboratory.

Supervision: The progress of the work will be supervised by the course responsible. Additional, 2 PhD students tutor the course participants during the design phase, 2 PhD students will tutor during the fabrication phase, and 1 PhD student will tutor during the evaluation phase.

Place of the course events: The first (compulsory!) meeting and the final project presentations are held in lecture halls as specified in the course schedule (see link to the right), the other meetings, lectures, review meetings, and the design work will be carried out in the students lab at KTH's downtown campus, Osquldas väg 10, 2nd floor, room A:213. Students will get unrestricted access to that lab during the project work. The fabrication will be done in KTH's cleanroom laboratory in Kista (Isafjordsgatan 22-24). The evaluation will be done at the Microsystem Technology Laboratory at the KTH downtown campus, Osquldas väg 10, 5th floor.

Official course description: Original course description in the KTH databas, last update 2010. (information on the course on KTH Social is more frequently updated)

Course office for students: STEX (Osquldas väg 10, ground floor).

Course content: The course consists of three introductory lectures (there the dates for the lectures 2 and 3 will be decided at the first meeting) followed by the course work, which is framed by weekly progress meetings with the course responsible and his teaching assistants. The student will be able to to design thier own microsystem devices using simulation and CAD tools, to fabricate the devices in a clean-room laboratory, to characterize the devices, and to analyse failure mechanisms as well as propose design improvements. The course starts with lectures introducing the student to MEMS design tools, and providing them with specifications of the real-world problems they have to solve. Then, the students will work in groups of 2–3, develop device concepts, and verify these using state-of-the art FEM simulation tools, and then design the devices with CAD software. In the next step, the students will fabricate their own devices with state-of-the-art micromachining/semiconductor manufacturing tools in the the KTH clean-room laboratory. Afterwards, the students will evaluate their devices by characterizing them with various test setups to find out which of their designs has best performance according to the given specifications. In the final step, the students will analyze the failure mechanisms of their devices, and have to propose design improvements for a potential next development cycle.

For any questions, in particular on the suitability of your background to the course, please contact the course coordinator.

For course material, schedule, etc. for the current academic year click at the items of the respective year in the menu to the right. Most items are only visible if you are logged-in/registered to this course.

Return to main course page.

Joachim Oberhammer redigerade 25 oktober 2012

BRIEF SUMMARY

The course is designed as a “hands-on” project course for students who would like to deepen their understanding of nano/microelectromachnical systems (NEMS/MEMS), by actively designing, fabricating and evaluating different microacuator concepts.

The course targets MSc level students, preferably with background in Electrical Engineering, Mechanical Engineering, or Engineering Physics. Pre-knowledge in microsystems, nanotechnology, or semiconductor technology is advantageous for some course parts, for instance the fabrication, but not necessary at all. General understanding of physics, and curiosity for the application of physical effects on a micro/nano-scale, is the best starting point for designing your own moving microsystem!

This course is given annually, in the 2nd period of every autumn term at KTH (HT-P2; October to December).

Promotional flyer to the course of 2012

In recent course runs, the students had to design:¶


* 2010: micro-optical switch for fiber-optic telecommunication networks
* 2011: micro-optical switch for fiber-optic telecommunication networks
* 2012: micro-gripper for manipulating cells

FURTHER INFORMATION

Course participants: Typically, 20% of the students are PhD students. Under certain circumstances, PhD students may create and carry out their own task in the world of microsystem technology.

Results of previous course evaluation: During 2011, 14 students took the course, of which 4 were PhD students. Course evaluation results from 2011 (only given for MSc students): 30% of the students consider the course as among the top 10% of KTH's courses, and 70% of the students consider the course as among the top 25% of KTH's courses.

Course language: English.

Course coordinator: Assoc.-Prof. Joachim Oberhammer, KTH School of electrical Engineering, Microsystem Technology Laboratory.

Supervision: The progress of the work will be supervised by the course responsible. Additional, 2 PhD students tutor the course participants during the design phase, 2 PhD students will tutor during the fabrication phase, and 1 PhD student will tutor during the evaluation phase.

Place of the course events: The first (compulsory!) meeting and the final project presentations are held in lecture halls as specified in the course schedule (see link to the right), the other meetings, lectures, review meetings, and the design work will be carried out in the students lab at KTH's downtown campus, Osquldas väg 10, 2nd floor, room A:213. Students will get unrestricted access to that lab during the project work. The fabrication will be done in KTH's cleanroom laboratory in Kista (Isafjordsgatan 22-24). The evaluation will be done at the Microsystem Technology Laboratory at the KTH downtown campus, Osquldas väg 10, 5th floor.

Official course description: Original course description in the KTH databas, last update 2010. (information on the course on KTH Social is more frequently updated)

Course office for students: STEX (Osquldas väg 10, ground floor).

Course content: The course consists of three introductory lectures (there the dates for the lectures 2 and 3 will be decided at the first meeting) followed by the course work, which is framed by weekly progress meetings with the course responsible and his teaching assistants. The student will be able to to design thier own microsystem devices using simulation and CAD tools, to fabricate the devices in a clean-room laboratory, to characterize the devices, and to analyse failure mechanisms as well as propose design improvements. The course starts with lectures introducing the student to MEMS design tools, and providing them with specifications of the real-world problems they have to solve. Then, the students will work in groups of 2–3, develop device concepts, and verify these using state-of-the art FEM simulation tools, and then design the devices with CAD software. In the next step, the students will fabricate their own devices with state-of-the-art micromachining/semiconductor manufacturing tools in the the KTH clean-room laboratory. Afterwards, the students will evaluate their devices by characterizing them with various test setups to find out which of their designs has best performance according to the given specifications. In the final step, the students will analyze the failure mechanisms of their devices, and have to propose design improvements for a potential next development cycle.

For any questions, in particular on the suitability of your background to the course, please contact the course coordinator.

For course material, schedule, etc. for the current academic year click at the items of the respective year in the menu to the right. Most items are only visible if you are logged-in/registered to this course.

Return to main course page.

Joachim Oberhammer redigerade 25 oktober 2012

BRIEF SUMMARY

The course is designed as a “hands-on” project course for students who would like to deepen their understanding of nano/microelectromachnical systems (NEMS/MEMS), by actively designing, fabricating and evaluating different microacuator concepts.

The course targets MSc level students, preferably with background in Electrical Engineering, Mechanical Engineering, or Engineering Physics. Pre-knowledge in microsystems, nanotechnology, or semiconductor technology is advantageous for some course parts, for instance the fabrication, but not necessary at all. General understanding of physics, and curiosity for the application of physical effects on a micro/nano-scale, is the best starting point for designing your own moving microsystem!

This course is given annually, in the 2nd period of every autumn term at KTH (HT-P2; October to December).

Promotional flyer to the course of 2012

 ¶

 In recent course runs, the students had to design:


* 2010: micro-optical switch for fiber-optic telecommunication networks
* 2011: micro-optical switch for fiber-optic telecommunication networks
* 2012: micro-gripper for manipulating cells
 ¶

 

FURTHER INFORMATION

Course participants: Typically, 20% of the students are PhD students. Under certain circumstances, PhD students may create and carry out their own task in the world of microsystem technology.

Results of previous course evaluation: During 2011, 14 students took the course, of which 4 were PhD students. Course evaluation results from 2011 (only given for MSc students): 30% of the students consider the course as among the top 10% of KTH's courses, and 70% of the students consider the course as among the top 25% of KTH's courses.

Course language: English.

Course coordinator: Assoc.-Prof. Joachim Oberhammer, KTH School of electrical Engineering, Microsystem Technology Laboratory.

Supervision: The progress of the work will be supervised by the course responsible. Additional, 2 PhD students tutor the course participants during the design phase, 2 PhD students will tutor during the fabrication phase, and 1 PhD student will tutor during the evaluation phase.

Place of the course events: The first (compulsory!) meeting and the final project presentations are held in lecture halls as specified in the course schedule (see link to the right), the other meetings, lectures, review meetings, and the design work will be carried out in the students lab at KTH's downtown campus, Osquldas väg 10, 2nd floor, room A:213. Students will get unrestricted access to that lab during the project work. The fabrication will be done in KTH's cleanroom laboratory in Kista (Isafjordsgatan 22-24). The evaluation will be done at the Microsystem Technology Laboratory at the KTH downtown campus, Osquldas väg 10, 5th floor.

Official course description: Original course description in the KTH databas, last update 2010. (information on the course on KTH Social is more frequently updated)

Course office for students: STEX (Osquldas väg 10, ground floor).

Course content: The course consists of three introductory lectures (there the dates for the lectures 2 and 3 will be decided at the first meeting) followed by the course work, which is framed by weekly progress meetings with the course responsible and his teaching assistants. The student will be able to to design thier own microsystem devices using simulation and CAD tools, to fabricate the devices in a clean-room laboratory, to characterize the devices, and to analyse failure mechanisms as well as propose design improvements. The course starts with lectures introducing the student to MEMS design tools, and providing them with specifications of the real-world problems they have to solve. Then, the students will work in groups of 2–3, develop device concepts, and verify these using state-of-the art FEM simulation tools, and then design the devices with CAD software. In the next step, the students will fabricate their own devices with state-of-the-art micromachining/semiconductor manufacturing tools in the the KTH clean-room laboratory. Afterwards, the students will evaluate their devices by characterizing them with various test setups to find out which of their designs has best performance according to the given specifications. In the final step, the students will analyze the failure mechanisms of their devices, and have to propose design improvements for a potential next development cycle.

For any questions, in particular on the suitability of your background to the course, please contact the course coordinator.

For course material, schedule, etc. for the current academic year click at the items of the respective year in the menu to the right. Most items are only visible if you are logged-in/registered to this course.

Return to main course page.