Brief summary of the course

The course is designed as a “hands-on” project course for students who would like to deepen their understanding of nano/microelectromachnical systems (NEMS/MEMS). The students will go through a complete microsystem engineering cycle. They will learn:

1. to conceptualize, simulate, and design their own microsystem/microactuator devices for given real-world specifications, by using state-of-the-art simulation and CAD tools,
2. to fabricate their own devices in a state-of-the-art 200-mm wafer semiconductor clean-room laboratory, and
3. to characterize their device, including the analysis of their failure mechanisms as well as to propose design improvements.

This course is given annually, in the 2nd period of every autumn term at KTH (HT-P2; typically last week of October to second week of December).

In recent course runs, the students had to develop the following microsystems:

• 2010: micro-optical switch for fiber-optic telecommunication networks
• 2011: micro-optical switch for fiber-optic telecommunication networks
• 2012: micro-gripper for manipulating cells

Below two screenshots from a promotional flyer of 2012.

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