Summary of the course

The course is designed as a “hands-on” project course for students who would like to deepen their understandingexperience the world of nano/microelectromachnical systems (NEMS/MEMS) by having a "hands-on" experience, i.e. by carrying out a microsystem engineering project by designing, fabricating and evaluating tiny but complex devices of sub-millimeter size. This course is given annually, in the 2nd period of every autumn term at KTH (HT-P2; typically last week of October to second week of December).

The students will go through a complete microsystem engineering cycle, as shown in the picture below. Upon completion of the course, they will be able:

* to conceptualize, simulate, and design their own microsystem/microactuator devices for given real-world specifications, by using state-of-the-art simulation and CAD tools,
* to fabricate their own devices in a state-of-the-art 200-mm wafer semiconductor clean-room laboratory, and
* to characterize their device, including the analysis of their failure mechanisms as well as to propose design improvements.
Course outline

Below two pictures of students (2012 course) fabricating their microsystems in KTH's clean-room.

clean-room fabrication 2012a

clean-room fabrication 2012b

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